Optical MEMS for telecoms

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چکیده

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Optical MEMS for telecoms

MEMS are finding an increasing number of applications in sensors, devices, and actuators1,2. MEMS are being applied to a wide range of systems. Progress is dramatic, especially in optical telecommunications3. These applications may be divided roughly into two classes: i) those requiring precise features for optical alignment, and ii) those involving the small moving optical parts necessary for ...

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ژورنال

عنوان ژورنال: Materials Today

سال: 2002

ISSN: 1369-7021

DOI: 10.1016/s1369-7021(02)00839-8